High quality factor superconducting coplanar waveguide fabricated with TiN
Liu Qiang
1
, Xue Guang-Ming
2
, Tan Xin-Sheng
1
, Yu Hai-Feng
1, 3, †
, Yu Yang
1, 3,
‡
(color online) XRD result of TiN films grown in different total gas pressures.