Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring
Lv Qi-Peng1, 2, Deng Song-Wen1, Zhang Shao-Qian1, Gong Fa-Quan1, Li Gang1, †
       

(color online) Transmission versus wavelength of the broadband AR coatings. Blue line represents the measured design deposited on the monitoring position. Purple line represents the measured design deposited on the 180 mm diameter position.