Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring
Lv Qi-Peng1, 2, Deng Song-Wen1, Zhang Shao-Qian1, Gong Fa-Quan1, Li Gang1, †
       

(color online) Measured relative coating thickness uniformity. Blue line represents Ta2O5 material for planet 1 (monitoring planet). Purple line represents Ta2O5 material for planet 2 (accompanying planet). Red line represents SiO2 material for planet 1. Green line represents SiO2 material for planet 2.