Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Lv Qi-Peng^{1, 2}, Deng Song-Wen¹, Zhang Shao-Qian¹, Gong Fa-Quan¹, Li Gang^{1, †}

(color online) Scheme of the Spector-HT system, which contains vacuum system, bake-up system, deposition system, and optical monitoring system.