Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment

Performance and reliability improvement of La₂O₃/Al₂O₃ nanolaminates using ultraviolet ozone post treatment

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Sun Bin¹, Duan Li¹, Yu Xiao-Chen¹

(color online) The C–V characteristics of (a) H₂O-based nanolaminates and (b) H₂O-based La₂O₃/Al₂O₃ nanolaminates with UV ozone post treatment before and after annealing (f = 100 kHz).