Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment

Performance and reliability improvement of La₂O₃/Al₂O₃ nanolaminates using ultraviolet ozone post treatment

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Sun Bin¹, Duan Li¹, Yu Xiao-Chen¹

(color online) The XPS core-level spectra of Si_2p and Al_2p for (a), (c) 10 nm and (b), (d) 1 nm La₂O₃/Al₂O₃ nanolaminates before annealing (as-dep.) and after annealing (annealed).