Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment

Performance and reliability improvement of La₂O₃/Al₂O₃ nanolaminates using ultraviolet ozone post treatment

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Sun Bin¹, Duan Li¹, Yu Xiao-Chen¹

(color online) CAFM images of H₂O-based La₂O₃/Al₂O₃ nanolaminates: (a) as-deposited, (b) annealed, (c) as-deposited nanolaminate with UV ozone treatment, and (d) annealed nanolaminate with UV ozone treatment.