Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment
Fan Ji-Bin1, †, Liu Hong-Xia2, Sun Bin1, Duan Li1, Yu Xiao-Chen1
       

(color online) O1s spectra of La2O3/Al2O3 nanolaminates without and with UV ozone post treatment before and after annealing.