Performance and reliability improvement of La2O3/Al2O3 nanolaminates using ultraviolet ozone post treatment

Performance and reliability improvement of La₂O₃/Al₂O₃ nanolaminates using ultraviolet ozone post treatment

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Sun Bin¹, Duan Li¹, Yu Xiao-Chen¹

(color online) (a) Thickness and (b) dielectric constant of the La₂O₃/Al₂O₃ nanolaminates before and after annealing.