Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate
XPS spectra of the sputtered GeSn film at 140 °C: (a) Ge 3d spectra, and (b) Sn 3d spectra.
Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate |
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XPS spectra of the sputtered GeSn film at 140 °C: (a) Ge 3d spectra, and (b) Sn 3d spectra. |
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