Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate
FWHM and surface roughness of the sputtered GeSn films at different deposition temperatures.
Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate |
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FWHM and surface roughness of the sputtered GeSn films at different deposition temperatures. |
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