Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate
Raman spectra of the GeSn thin films sputtered at RT and elevated substrate temperatures.
Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate |
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Raman spectra of the GeSn thin films sputtered at RT and elevated substrate temperatures. |
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