Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate

Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge_1−xSn_x films on Si substrate

Mahmodi H^{1, †}, Hashim M R²

(color online) FESEM and AFM images of the GeSn alloy films sputtered at various substrate temperatures.