Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge1−xSnx films on Si substrate

Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge_1−xSn_x films on Si substrate

Mahmodi H^{1, †}, Hashim M R²

(color online) Typical EDX spectra of the RT sputtered Ge_1−xSn_x sample.