Influence of low temperature on the surface deformation of deformable mirrors
You Juncheng1, 2, 3, Guan Chunlin1, 2, †, Zhou Hong1, 2
       

(color online) Surface deformation of base of optimized ULE DM in 150 mm diameter at −20 produced by (a) actuator 1, PV = 0.005 μm; (b) all actuators, PV = 0.03 μm.