Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference |
(color online) (a) 2D optical field distribution for double exposure with different laser wavelengths (325 nm and 442 nm), where the sample rotation angle is 90°. (b) Quadruple exposure, where the wavelength of each exposure is 325 nm, 442 nm, 325 nm, and 442 nm respectively. The sample is rotated by 45° after each exposure. |