Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

Chen Yizhen¹, Wang Xiangxian^{1, †}, Wang Ru¹, Yang Hua¹, Qi Yunping²

(color online) (a) 2D optical field distribution for triple exposure, with the sample being rotated by 60° after each exposure. (b) Magnified segment from panel (a). (c) 3D optical field distribution of one period.