Structural characterization of Al0.55Ga0.45N epitaxial layer determined by high resolution x-ray diffraction and transmission electron microscopy
Xu Qing-Jun1, 2, Liu Bin1, †, Zhang Shi-Ying1, 2, Tao Tao1, Xie Zi-Li1, Xiu Xiang-Qian1, Chen Dun-Jun1, Chen Peng1, Han Ping1, Zhang Rong1, ‡, Zheng You-Dou1
       

Measured FWHMs of off-axis skew-symmetric (except (0002) plane) plotted against surface-to-plane angle.