Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiOx/Si system
Gao Ming1, Du Hui-Wei1, Yang Jie1, Zhao Lei1, Xu Jing2, Ma Zhong-Quan1, 2, †
       

(color online) The transmittance spectra of ITO film (80 nm) on glass.