Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO
x
/Si system
Gao Ming
1
, Du Hui-Wei
1
, Yang Jie
1
, Zhao Lei
1
, Xu Jing
2
, Ma Zhong-Quan
1, 2, †
(color online) The transmittance spectra of ITO film (80 nm) on glass.