Superjunction nanoscale partially narrow mesa IGBT towards superior performance

Yu Qiao-Qun, Lu Jiang^†, Liu Hai-Nan, Luo Jia-Jun, Li Bo, Wang Li-Xin, Han Zheng-Sheng

(color online) Cross-sectional view of conventional IGBT and 30 nm SJ-PNM-IGBT with one active cell and 10 dummy cells.