Superjunction nanoscale partially narrow mesa IGBT towards superior performance
Yu Qiao-Qun, Lu Jiang †, Liu Hai-Nan, Luo Jia-Jun, Li Bo, Wang Li-Xin, Han Zheng-Sheng
       

(color online) Simulated Vce(sat) and breakdown voltage of the SJ-PNM-IGBT with different pillar doping concentrations and mesa widths.