Superjunction nanoscale partially narrow mesa IGBT towards superior performance

Yu Qiao-Qun, Lu Jiang^†, Liu Hai-Nan, Luo Jia-Jun, Li Bo, Wang Li-Xin, Han Zheng-Sheng

(color online) Cross-sectional view of (a) the conventional IGBT, (b) the PNM-IGBT, (c) the SJ-IGBT, and (d) the SJ-PNM-IGBT. The mesa widths of the conventional trench structure and the PNM trench structure are 2.8 μm and 30 nm, respectively.