Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors
Band diagram of the surface-treated AlGaN/GaN heterostructure with Al electrode.
Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors |
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Band diagram of the surface-treated AlGaN/GaN heterostructure with Al electrode. |
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