Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors
(color online) Cross sectional view of the evaluation structure fabricated on a partially-treated surface.
Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors |
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(color online) Cross sectional view of the evaluation structure fabricated on a partially-treated surface. |
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