Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge
Waveforms of (a) applied voltage and (b) discharge current density when driven by the pulse-modulated rf power.
Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge |
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Waveforms of (a) applied voltage and (b) discharge current density when driven by the pulse-modulated rf power. |
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