Crystallization behaviors of ultrathin Al-doped HfO
2
amorphous films grown by atomic layer deposition
Ma Xue-Li
1, 3
, Yang Hong
1, 3
, Xiang Jin-Juan
1, 3
, Wang Xiao-Lei
1, 3
, Wang Wen-Wu
1, 3, †
, Zhang Jian-Qi
2
, Yin Hua-Xiang
1, 3
, Zhu Hui-Long
1, 3
, Zhao Chao
1, 3
(color online) Schematic diagram of experimental MOS structure.