Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Yan Ting-Yang^{1, 2}, Shen Xiang^{1, 2, †}, Wang Rong-Ping³, Wang Guo-Xiang^{1, 2}, Dai Shi-Xun^{1, 2}, Xu Tie-Feng^{1, 2}, Nie Qiu-Hua^{1, 2}

(color online) For the hot-embossing waveguide from RF-sputtered As–Se thin film on the pressed Ge–As–Se substrate: (a) ESEM cross-sectional image of a cleaved edge of an RF-sputtered As–Se thin film on the top of a Ge–As–Se substrate. (b) a near-field intensity profile observed at 1550-nm wavelength in the quasi-TE mode. SEM image of (c) top view of ribs and (d) one of the ribs at higher magnification, with a cross-sectional view sown in the inset. (Abdel-Moneim et al. 2015).^[23]