Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Yan Ting-Yang^{1, 2}, Shen Xiang^{1, 2, †}, Wang Rong-Ping³, Wang Guo-Xiang^{1, 2}, Dai Shi-Xun^{1, 2}, Xu Tie-Feng^{1, 2}, Nie Qiu-Hua^{1, 2}

(color online) SEM images of the embossed As₂S₃ waveguides: (a) side wall image at 45^°; (b) plan view of the embossed waveguide surrounded by depressed trenches; (c) magnified portion from panel (b) showing some roughening at the bottom of the rib. (Han et al. 2011).^[25]