Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Yan Ting-Yang^{1, 2}, Shen Xiang^{1, 2, †}, Wang Rong-Ping³, Wang Guo-Xiang^{1, 2}, Dai Shi-Xun^{1, 2}, Xu Tie-Feng^{1, 2}, Nie Qiu-Hua^{1, 2}

SEMs of (a) Si mold cross-section and (b) top view of As₄₀Se₆₀ ribs on the Ge₁₇As₁₈Se₆₅ substrate together with a cross-sectional view at higher magnification. (c) Nearfield intensity profile observed at 1.55 μm. (Pan et al. 2008).^[21]