Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Wang Ru¹, Wang Xiangxian^1,, Yang Hua¹, Qi Yunping²

(color online) (a) Dispersion curves for different waveguide modes with photoresist RI 1.7. (b) The relationship between HSPS period and photoresist thickness for different waveguide modes. Here, the RI for the photoresist and prism are 1.7 and 1.85, respectively.