Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Wang Ru¹, Wang Xiangxian^1,, Yang Hua¹, Qi Yunping²

(color online) (a) Dispersion curves for TE₂ modes for different values of photoresist RI. (b) The relationship between HSPS period and photoresist thickness with different values of photoresist RI using TE₂-mode interference. The prism RI is 1.7.