Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph |
(color online) (a) Dispersion curves for TE2 modes for different values of photoresist RI. (b) The relationship between HSPS period and photoresist thickness with different values of photoresist RI using TE2-mode interference. The prism RI is 1.7. |
![]() |