Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Wang Ru¹, Wang Xiangxian^1,, Yang Hua¹, Qi Yunping²

(color online) (a) Simulated electric field of TE₅ waveguide-mode interference. (b) The simulated magnetic-field component of TM₅ waveguide-mode interference. The white lines indicate the interfaces of glass, Ag, photoresist, and air, from top to bottom. The prism RI is 1.6, and the photoresist RI and thickness are 1.7 and 950 nm, respectively.