Measurement and analysis of the surface roughness of Ag film used in plasmonic lithography

Liang Gao-Feng^{1, 2}, Jiao Jiao¹, Luo Xian-Gang², Zhao Qing^{1, †}

(color online) Upper side morphologies represented by AFM images over an area of m (256 × 256 pixels): (a) 100 nm-thick Ag film on SiO /Si(100), (b) 100 nm-thick Ag film on PR/SiO /Si(100). (c), (d) Histograms of the surface height values from the respective topographies.