Measurement and analysis of the surface roughness of Ag film used in plasmonic lithography

Liang Gao-Feng^{1, 2}, Jiao Jiao¹, Luo Xian-Gang², Zhao Qing^{1, †}

(color online) (a) Diagram of the Ag/PR/Ag structure used in photolithography. (b) Cross section of the Ag/PR/Ag structure with rough surfaces.