Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation
(color online) Schematic diagram of the ICP immersion ion implantation instrument.
Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation |
|
(color online) Schematic diagram of the ICP immersion ion implantation instrument. |
| |