Influences of annealing on structural and compositional properties of Al<sub>2</sub>O<sub>3</sub> thin films grown on 4H

Influences of annealing on structural and compositional properties of Al₂O₃ thin films grown on 4H–SiC by atomic layer deposition

Tian Li-Xin, Zhang Feng^†,, Shen Zhan-Wei, Yan Guo-Guo, Liu Xing-Fang, Zhao Wan-Shun, Wang Lei, Sun Guo-Sheng, Zeng Yi-Ping

Root-mean-square (RMS) roughness of Al₂O₃ films with different annealing temperatures.