High-performance InGaN/GaN MQW LEDs with Al-doped ZnO transparent conductive layers grown by MOCVD using H<sub>2</sub>O as an oxidizer

High-performance InGaN/GaN MQW LEDs with Al-doped ZnO transparent conductive layers grown by MOCVD using H₂O as an oxidizer

Lin Jia-Yong¹, Pei Yan-Li^{1, †,}, Zhuo Yi¹, Chen Zi-Min², Hu Rui-Qin¹, Cai Guang-Shuo¹, Wang Gang^{1, ‡,}

The 2θ to ω XRD patterns of ZnO (0002) peaks of H₂O-AZO- and O₂-AZO-TCLs deposited on sapphire substrates.