Parasitic effects of air-gap through-silicon vias in high-speed three-dimensional integrated circuits
Liu Xiaoxian, Zhu Zhangming†, 
, Yang Yintang, Ding Ruixue, Li Yuejin
, Yang Yintang, Ding Ruixue, Li Yuejin 
Parasitic effects of air-gap through-silicon vias in high-speed three-dimensional integrated circuits |
|
Liu Xiaoxian, Zhu Zhangming†,
, Yang Yintang, Ding Ruixue, Li Yuejin |
| |