Polydisperse spherical colloidal silica particles: Preparation and application
Kong Hui1, 2, Huo Junchao1, Liang Chenliang1, 2, Li Shasha1, 2, Liu Weili1, †, 
, Song Zhitang1
, Song Zhitang1 (a) MRRs of polydisperse PCS-A and monodisperse MCS-B; (b) COF of polydisperse PCS-A and monodisperse MCS-B during CMP process.
