Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications
Jiang Qianqing1, 4, 5, Li Wuxia1, †, 
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡,
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡, Effect of the etching time on the top shape of pillars: (a) diamond pillar array fabricated with the PMMA approach; (b)–(e) tomographic evolution of a 200 nm diameter pillar when the etching time was 70 min, 130 min, 160 min, and 310 min; (f), (g) tomographic evolution of a 1 μm diameter pillar when the etching time was 70 min and 310 min, respectively. The scale bar is 500 nm.
