Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications
Jiang Qianqing1, 4, 5, Li Wuxia1, †, 
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡,
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡, Apex angle variation. (a) Effects of mask type and mask pattern period. The measured pillars are 100 nm in diameter. (b) Effect of mask diameter. Here the pillar period is three times that of the pillar diameter.
