Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications
Jiang Qianqing1, 4, 5, Li Wuxia1, †, 
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡,
, Tang Chengchun1, Chang Yanchun1, 5, Hao Tingting1, 5, Pan Xinyu1, Ye Haitao3, Li Junjie1, Gu Changzhi1, 2, 5, ‡, Pillars fabricated with the HSQ negative resist approach having diameters and periods of: (a) 50 nm, 100 nm; (b) 100 nm, 500 nm; (c) 220 nm, 500 nm; (d) 730 nm, 1.5 μm; (e) 500 nm, 1.5 μm; (f) 1.0 μm, 2.0 μm.
