Low specific contact resistivity to graphene achieved by AuGe/Ni/Au and annealing process
Yu Shu-Zhen
1, †,
, Song Yan
1, 2
, Dong Jian-Rong
1
, Sun Yu-Run
1
, Zhao Yong-Ming
1, 3
, He Yang
1, 3
Optical microscope image of the fabricated metal–graphene CTLM patterns on 300 nm SiO
2
/Si substrate.