Recessed-gate quasi-enhancement-mode AlGaN/GaN high electron mobility transistors with oxygen plasma treatment
He Yun-Long
1
, Wang Chong
1, †,
, Mi Min-Han
1
, Zheng Xue-Feng
1
, Zhang Meng
2
, Zhao Meng-Di
1
, Zhang Heng-Shuang
1
, Chen Li-Xiang
2
, Zhang Jin-Cheng
1
, Ma Xiao-Hua
1, 2
, Hao Yue
1, 2
Gate leakage current for three samples.