One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma
Wang Shuai1, †, , Long Hai-Feng1, Bi Zhen-Hua2, Jiang Wei3, Xu Xiang4, Wang You-Nian4
       

The self-bias VDC on the electrode with different phase angles Θ caused by the second-order harmonic with V0 = 400 V.