One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma
Wang Shuai1, †, 
, Long Hai-Feng1, Bi Zhen-Hua2, Jiang Wei3, Xu Xiang4, Wang You-Nian4
, Long Hai-Feng1, Bi Zhen-Hua2, Jiang Wei3, Xu Xiang4, Wang You-Nian4 Schematic diagram of the DC/RF combined driven capacitively coupled plasma reactor.
