One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma

Wang Shuai^{1, †,}, Long Hai-Feng¹, Bi Zhen-Hua², Jiang Wei³, Xu Xiang⁴, Wang You-Nian⁴

The value of η calculated from Eq. (8), using the assumption that the symmetry parameter equals to 1.