One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma
Wang Shuai1, †, , Long Hai-Feng1, Bi Zhen-Hua2, Jiang Wei3, Xu Xiang4, Wang You-Nian4
       

Solutions of Eq. (5), the RF phases corresponding to the max voltage drop as a function of the phase angle between the first and the fourth harmonics.