High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer

Fang Wenjing^{1, 2}, Huang Yongqing^{1, 2, †,}, Duan Xiaofeng^{1, 2}, Liu Kai^{1, 2}, Fei Jiarui^{1, 2}, Ren Xiaomin^{1, 2}

(a) Measured intensity at different positions in the z direction. (b) Measurement results (points) and the fitting results (continuous lines) at different positions in the x direction.