High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer
Fang Wenjing1, 2, Huang Yongqing1, 2, †, 
, Duan Xiaofeng1, 2, Liu Kai1, 2, Fei Jiarui1, 2, Ren Xiaomin1, 2
, Duan Xiaofeng1, 2, Liu Kai1, 2, Fei Jiarui1, 2, Ren Xiaomin1, 2 Optical microscope picture of a fabricated non-periodic HCGs reflector. The groove width in a location is shown in the SEM image in the inset.
